MICROCAM^TM-3D/4D interferometer

for high-precision non-contact surface & thickness measurements

As a core component of any NOVACAM^TM 3D metrology system, the MICROCAM^TM-3D/4D interferometer provides light source to optical scanning probes and carries out the optical and electronic processing of measurements.

Novacam interferometers MICROCAM-3D and MICROCAM-4D offer:

Micron-precision 3D measurements – roughness, geometry (GD&T parameters), thickness, vibration, defects
Fast acquisition rate of up to 100 kHz, i.e., 100,000 3D point measurements per second
Measurements not affected by ambient lighting, air perturbation, or cutting of the beam
Modularity and versatility of deployment, with fiber based optical probes that may be integrated on motion stages, robots, gantrys, CMMs, and CNCs.
Many additional advantages offered by the underlying technology, low-coherence interferometry.

A selection of NOVACAM fiber-based optical probes is available to provide non-contact surface and cross-sectional measurement in a wide range of industrial inspection applications.

Overview

Overview of features and benefits

Measurements

Optical, non-contact, non-destructive
High speed: up to 100,000 3D point measurements per second
Micron resolution, excellent S/N ratio
2D and 3D surface and subsurface characterization
Roughness, geometry, thickness, vibration
Long stroke profilometry

Imaging

Surface profiles
Cross-sections of transparent or semi-transparent material
Volumetric images

Fiber-based probes

Inspect even inside bores, tubes, and crevices
Are non-contact and therefore not a consumable
Are easily installed wherever required in the process—on a CNC, robot head, or any combination of precision stages
Provide versatility for high-speed online inspection

Benefits

Wide range of materials: metal, plastics, polymers, glass, metal coatings, silicone, adhesives; reflective, transparent, semi-transparent, specular, nonspecular
Wide range of objects and surfaces: objects can be small (several microns wide) to large (no upper limit), stationary or moving, solid or liquid, and include interiors of bores and tubes, exteriors of cylinders, concave or convex spherical shapes, extremely hot or cold, or radioactive
Measurements not affected by ambient lighting, air perturbation, or cutting of the beam: systems suitable for industrial-floor deployment as well as lab environment
Versatility of setup: Non-contact fiber-based probes work up to 1 m away from surface
The same profilometer is capable of measuring roughness, geometry, and defects. This allows many of our clients to use the system for a variety of related inspection tasks.
Small-diameter probes reach in to measure insides of bores and small-diameter tubes
High-aspect-ratio surface features can be acquired: channels, grooves, steps, sharp edges, and more
Continuous, long profile scanning: no area stitching required
Easy integration of fiber probes in labs and in process: on XY tables, on multi-axes scanning mechanisms, inside machining centers, above moving webs, etc.
Rugged probes: inspection possible in hostile environments where humans cannot work
Option of multiplexing probes with single interferometer for additional ROI
USB connection for data transfer from interferometer to PC or laptop

Specifications

MICROCAM^TM interferometer specifications

	MICROCAM-3D		MICROCAM-4D
General characteristics
Technology	low-coherence interferometry
Light wavelength	1310 nm, infrared
Size of interferometer enclosure box (depth x width x height)	4U rackable enclosure 445 x 445 x 178 mm
Non-contact measurements
Depth of field	depends on the characteristics of the selected probe
Scanning depth range options*	3.5 mm	7 mm	5 mm
Acquisition (A-scan) rate	2.10 kHz	1.05 kHz	100 kHz
Axial (Z-axis) resolution	< 0.5 µm
Light spot size (Lateral [XY-axis] resolution)	2.2 - 146 µm, depends on selected probe
Standoff distance	0.5 - 100 mm for standard probes up to 1 m for non-standard probes
Repeatability	< 1 µm
Thickness measurements
Thickness measurement range (in Air, IR = 1.0)	10 µm - 3.5 mm	10 µm - 7 mm	20 µm - 5 mm
Typical materials for thickness measurements	glass, polymers, multi-layer films, coatings, plastics, silicone, liquids, specular or non-specular
Sample reflectivity	0.1 - 100%
*To further increase maximum scanning depth, a mechanical displacement axis is available.

Accessories

Accessories include NOVACAM^TM fiber-based optical probes (4 basic types and custom probes) and optical switch hardware that enables multiplexing several probes to one interferometer.

Optical probes

1) Forward-looking probes

Probe diameters from 0.55 mm to 30.5 mm
Standoff from 0.5 mm to 140 mm
Used in NOVACAM OPTICAL 3D PROFILOMETER system

2) Side-looking probes

For measurements in hard-to-reach spaces
Probe diameters from 0.55 mm to 30.55 mm
Probe lengths from 75 mm to 300 mm
Used in NOVACAM OPTICAL 3D PROFILOMETER and TUBEINSPECT systems

Examples of forward-looking and side-looking probes

Click for close-up of image.

3) Rotational scanner (RS) probes

For measurements in hard-to-reach spaces (bores, tubes, etc.)
3 models: RS0, RS1, RS2
Probe diameters from 0.55 mm to 17.8 mm
Up to 30 rotations/second (1800 RPM)
Used in NOVACAM BOREINSPECT and RIVETINSPECT systems

Rotational scanner RS2 with 4.5mm diameter probe

4) Galvo scanner (GS) probes

For efficient area or strip scanning in a raster pattern
Field of view from 5×5 mm to 90×90 mm
Standoff distance from 7.5 mm to 215 mm
Used in NOVACAM SURFACEINSPECT, EDGEINSPECT and RIVETINSPECT systems

Galvo scanners GS1 and GS2

Custom probes

Novacam also designs and builds custom probes as needed. These can be:

Forward-looking and side-looking probes with non-standard diameters and lengths
Side-looking and rotational probes with non-standard light beam angles
Custom probes for extreme temperatures, high pressures, radioactive environments, or other hostile environments.

Optical switches for use with multiple probes

Optical switches are available for multiplexing up to 8 probes to a single interferometer. With this configuration, one probe may scan at a time.

Applications

Metrology Applications

Typical measurements

Dimensions: GD&T (Geometrical dimensioning and tolerancing) parameters
Surface roughness: (Ra, Rq, Rsk, Rku, Rv, etc.),
Thickness: single-layer or multilayer films, coatings
Volume loss: component wear or other damage
High-aspect-ratio features: steps, holes, grooves, channels
Hard-to-reach spaces: interiors of bores, small aperture tubes, etc.
Profilometry in hostile environments: radioactive, cryogenic, very hot
Long stroke profiles

3D metrology and imaging for industry and R&D

Quality control
Online 3D production inspection, GD&T
Statistical process control SPC
R&D

Gallery

MICROCAM^TM-3D/4D interferometer

for high-precision non-contact surface & thickness measurements