OPTICAL 3D PROFILOMETER^TM system

for non-contact 3D surface and thickness measurements

NOVACAM^TM OPTICAL 3D PROFILOMETER^TM system is fiber-based and provides:

Micron-precision 3D measurements
- Dimensional geometry – GD&T parameters
- Roughness measurement
- Defect detection – cracks, scratches
- Thickness measurement of semi-transparent materials
Option to scan even hard-to-reach surfaces: Side-looking probe scans inside bore IDs and other tight spaces, forward-looking probe is also available
Fiber-based probes that are easy to integrate with precision stages, third-party CMMs, CNC machines, or robots to support high-volume continuous flow manufacturing
Fully configurable automated inspection.

Notably the same probe can be used to measure dimensions, roughness, defects, and/or thickness.

Overview

Overview of features and benefits

Measurements

Optical, non-contact, non-destructive
High speed: Up to 100,000 3D point measurements per second
Micron resolution, excellent S/N ratio
2D and 3D surface and subsurface characterization
Dimensions, roughness, defects, thickness
Long stroke profilometry

Imaging

Surface profiles
Cross-sections
Volumetric images

Fiber-based probes

Inspect inside bores, tubes, and crevices
Provide versatility for high-speed online inspection

Benefits

Wide range of materials: metal, plastics, polymers, glass, metal coatings, silicone, adhesives; reflective, transparent, semi-transparent, specular, nonspecular
Wide range of surfaces: measured objects can be stationary or moving, solid or liquid, and include interiors of bores and tubes, exteriors of cylinders, concave or convex spherical shapes
Small-diameter probes reach in to measure insides of bores and small-diameter tubes
Measures high-aspect-ratio features: undercuts, cross-holes, chamfers, rifling, threads, O-ring grooves, and edges
Reduced inspection cycle time: up to 100,000 measurements per second, each representing a 3D topographic point
Versatility of setup: Non-contact probes work up to 1 m away from surface and several meters from the interferometer
Continuous, long profile scanning: no area stitching required
Flexible options for evaluating inspected parts: measured features can be compared to CAD drawings or to a user-defined set of locations, nominals, and tolerances
Simple scan definition and execution: The scanning sequence is defined once by teaching the system with a joystick. The scanning sequence can later be executed with the push of a button.
Time-saving automated reporting: Following a scan, go-no-go reports can be produced, and results logged in a manner compatible with industry-standard mechanisms
Easily integrated in lab, shop, or fully-automated inspection setups: probes may be mounted on XY tables, on multi-axes scanning mechanisms, inside machining centers, above moving webs, on robot heads, etc.
Adaptable to hostile environments: radioactive, very hot, cryogenic, vacuum, etc.
No consumables are needed: Optical probes do not come in contact with the measured samples, and therefore do not wear out like contact probes
USB connection for data transfer from interferometer to PC or laptop
Option of multiplexing several probes with single interferometer for additional return on investment (ROI)

Applications

Metrology Applications

Typical measurements

Dimensional measurements: geometric dimensioning and tolerancing (GD&T) parameters
Thickness: single-layer or multilayer films, coatings
Surface roughness: surface characterization, flatness, and more
Volume loss: component wear or other damage
High-aspect-ratio features: steps, holes, grooves, channels
Hard-to-reach spaces: interiors of bores, small aperture tubes, etc.
Profilometry in hostile environments: radioactive, cryogenic, very hot
Long stroke profiles
Thickness of non-transparent materials

3D metrology and imaging for industry and R&D

Quality control
Online 3D production inspection, GD&T
Statistical process control SPC
R&D

Examples of applications

Electronics industry: geometry measurements of CMP pad grooves, glass edge and thickness measurement, wafer geometry
Aerospace: jet engine turbine vanes
Automotive: drive shafts, axles, threads, splines, gears, drive teeth
Medical instruments sector: tubes, implant shaft interiors, optical cross-sections of intra-ocular lenses
Biomedical and chemical sectors: vials, IDs of cylindrical containers
Defence industry: barrels, bores, reamers, mandrels, drill bits, die blocks
Tubular parts in high-precision machining, drilling, injection molding, 3D printing, additive manufacturing, casting, extrusion dies

Gallery

Software

System Software

The OPTICAL 3D PROFILOMETER system comes with NOVACAM high-performance data acquisition software, which is PC Windows^®-based and user-friendly for scan programming.

NOVACAM data acquisition software

The system simultaneously generates 3 data sets from the same scan: 3D point cloud, light intensity image, and height image. The height and light intensity images facilitate defect detection. STL file format is also available.

Example of the 3 data sets generated from the same scan: 1) 3D point-cloud (view from top) viewed in a PolyWorks Inspector, 2) height-image, 3) intensity image.

For full GD&T analysis of measured parts, a turnkey solution is available with PolyWorks Inspector^TM metrology software that may be purchased with the system.

Go-no-go reporting is easily programmed and automated.

Example of automated GD&T report with pass and fail

Users benefit from capabilities such as a quick visual comparison (deviation map) of the acquired part measurements to pre-specified tolerances or to the CAD of the part.

3D measurement data analysis with PolyWorks Inspector

Visualizing the scan data may be accomplished by importing the data into various third party visualization and numerical analysis software, such as PolyWorks Inspector, Geomagic, ImageJ, SolidWorks, Octave, MatLab, Mathematica, IDL, or IGOR Pro.

Deriving application-specific measurements from the 3D point cloud is available through a selection of in-house and third party software. Novacam supports the following options:

	Novacam in-house software	3rd party software, such as
Dimensional measurements (GD&T parameters)		PolyWorks Inspector (turnkey solution) Geomagic
Roughness and surface analysis		TrueSurf, MountainsMap
Thickness
Chatter (vibration)
Volume loss
Defects	Custom-developed*
* Novacam offers the option of custom data processing, reporting, and defect detection programs that can be written based on client requirements.

An application programming interface (API) is available for system integrators and OEMs to accommodate a wide variety of online and offline applications. Exported results may be integrated with data loggers and SPC software.

System components

NOVACAM^TM OPTICAL 3D PROFILOMETER^TM is a modular system comprised of 1) an optical side- or forward-looking probe, 2) MICROCAM^TM interferometer, 3) an inspection station, 4) a PC, and, optionally, 5) multiplexing hardware (not shown in diagram).

The inspection capabilities of the optical 3D profilometer are determined jointly by its components:

1) Optical probe

NOVACAM forward-looking and side-looking optical probes come in several standard sizes and lengths and can be custom built as well. The probes may be mounted on various motion stages, or installed next to a moving surface to acquire long profiles.

Examples of probes

(click image for close-up view)

Standard probe characteristics*

Type of probe	Probe diameter (mm)	Maximum standoff distance (mm)	Typical Spot size (µm) **	Probe length (mm)
Forward-looking probe	17.8	68	2.2 to 23	50-300***
Side-looking probe	0.55	0.5	4 - 25
	1.05	1
	2.4	1.3
	3.05	4.8
	4.6	15
	17.8	54
Custom probes with non-standard diameters (such as ø8.8 or ø30.5 mm), lengths, spot sizes, and light beam angles (different from the standard 90°) or for extreme temperatures, high pressures, or other hostile environments are built upon request. Full width half max (FWHM) **Maximum probe length may be limited by mechanical constraints. Probes as long as 2 m have been built.

2) MICROCAM interferometer

The Microcam interferometer provides the light source to the optical probe and processes the optical signal received from the probe.

MICROCAM interferometer models

	MICROCAM-3D		MICROCAM-4D
General characteristics
Technology	low-coherence interferometry
Light wavelength	1310 nm, infrared
Size of interferometer enclosure box (depth x width x height)	4U rackable enclosure 445 x 445 x 178 mm
Non-contact measurements
Depth of field	depends on selected probe parameters, see table "Standard probe characteristics" above
Scanning depth range options *	3.5 mm	7 mm	5 mm
Acquisition (A-scan) rate	2.10 kHz	1.05 kHz	100 kHz
Axial (Z-axis) resolution	< 0.5 µm
Light spot size (Lateral [XY-axis] resolution)	2.2 - 146 µm, depends on selected probe parameters, see table "Standard probe characteristics" above
Standoff distance	0.5 - 100 mm for standard probes up to 1 m for non-standard probes
Repeatability	< 1 µm
Thickness measurements
Thickness measurement range (in Air, IR = 1.0)	10 µm - 3.5 mm	10 µm - 7 mm	20 µm - 5 mm
Typical materials for thickness measurements	glass, polymers, multi-layer films, coatings, plastics, silicone, liquids, specular or non-specular
Sample reflectivity	0.1 - 100%
*To further increase maximum scanning depth, a mechanical displacement axis is available.

3) Inspection station

Inspection station configurations are application-dependent and can be supplied by Novacam. Fixturing for the part is not included.

For lab and shop floor inspection, profilometer inspection stations typically include probe displacement in 1, 2, or 3 axes. Granite tables are optionally available and recommended for some applications.

For automated inline industrial inspection, the profilometer probes may be integrated with precision stages, third-party CMMs (coordinate-measuring machines), CNC (computer numerical control) machines, or robots to support high-volume continuous flow manufacturing.

4) PC, monitor and joystick

The profilometer comes with a PC (with NOVACAM acquisition software), a monitor, mouse, and joystick.

5) Motion controller(s)

Motion controllers are included. Depending on the number of additional motion axis required, the motion controller(s) are housed in a 2U, 3U, or 4U rackable enclosure.

6) Hardware for multiplexing support (optional)

Optical switches are available for multiplexing up to 8 probes to a single MICROCAM interferometer. Multiplexed probes may be used one at a time. This option brings additional return on investment (ROI) to many installations.

Additional info

Standard system configuration

A standard configuration of the OPTICAL 3D PROFILOMETER system includes:

MICROCAM-3D interferometer
Choice of
- 1 standard ⌀17.8 mm forward-looking probe
OR
- 1 standard ⌀4.6 mm side-looking probe (for ID up to 300 mm (12″) deep)
2-axis inspection station and 2-axis motion controller
Manual adjustment of probe height
PC with NOVACAM acquisition software
1 year warranty

Instrument safety

MICROCAM systems feature an in-probe red laser pointer (650 nm wavelength) for alignment purposes.
MICROCAM systems are Class 1M Laser products, with < 20 mW of infrared and < 5 mW of in-probe laser pointer.

MicroCam profilometers are Class 1M laser products

FAQ

What is the advantage of using a non-contact vs. contact profilometer for roughness measurement?

Non-contact roughness measurements systems offer important advantages over contact measurement systems:

- no risk of affecting the surfaces as frequently happens with contact probe styluses

Light-intensity image of roughness gauge clearly shows traces left by contact stylus

- no need for expensive consumables – optical probes do not get used up in the process of measuring
- no need for costly stoppages to exchange worn out contact probes.

Is the OPTICAL 3D PROFILOMETER system easy to use?

Yes. The scanning sequence (recipe) can be programmed with a joystick and can be recalled at later times with the push of a button.

Is the system able to work right on production floor?

Yes. The system is ideally suited to both lab and shop floor inspection. Inline and robot setups are an option. The non-contact probes can even be configured to work in hostile environments such as extremely hot, cryogenic, or radioactive.

Can the OPTICAL 3D PROFILOMETER give us automated measurements and reports?

Yes.

Can the OPTICAL 3D PROFILOMETER measure parts that have high-aspect ratio features such as blind slots or holes?

Yes, depending on the geometry of the features to be scanned. Various curved surfaces and high-aspect ratio features have been scanned. Displacement stages can be added to the setup if required.

Can the OPTICAL 3D PROFILOMETER be used to measure the thickness of a coating?

Yes, if the coating is semi-transparent to infrared light and has optical thickness of 20 µm or higher (optical thickness = physical thickness * index of refraction).

OPTICAL 3D PROFILOMETER^TM system

for non-contact 3D surface and thickness measurements